Piezoelectric oscillating circuit, method for manufacturing...

Details Piezoelectric oscillating circuit, method for manufacturing... Piezoelectric oscillating circuit, method for manufacturing...

2004-06-16

2008-11-25

Olsen, Allan (Department: 1792)

Etching a substrate: processes

Forming or treating electrical conductor article

Reexamination Certificate

active

07455786

ABSTRACT:
In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.

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