Piezoelectric multiaxis micropositioner

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310317, H01L 4108

Patent

active

047272783

ABSTRACT:
An electromechanical translation apparatus comprising a driven member which is adapted to be incrementally moved in a selected direction, and a piezoelectric multiaxis micropositioner adapted to produce incremental movement of the driven member in the selected direction wherein the micropositioner includes a mounting means, at least one piezoelectric driver assembly having a housing, an engaging member formed of a hard material having a selected driving end at one end thereof and a driven end at the other end wherein the engaging member's one end is positioned to selectively engage and translate said driven member in response to a driving force, and at least three piezoelectric driver elements positioned between the driven end of the engaging member and the housing wherein the piezoelectric driver elements are positioned in a spaced, angular relationship to the others and wherein each piezoelectric driver element is capable of separately responding to an electrical signal having a predetermined frequency and amplitude which varies between a first polarity and second polarity to expand and contract to change its geometrical dimension to apply a driving force on the engaging member which imparts an incremental movement to the driven member in the selected direction is shown. The use of an electromechanical translation apparatus as a piezoelectric multiaxis micropositioner for incrementally rotating a sphere having an optical element affixed thereto for use in an optical path is also shown.

REFERENCES:
patent: 4408832 (1983-10-01), Hartman et al.
patent: 4422002 (1983-12-01), Binning et al.
patent: 4523120 (1985-06-01), Assard

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