Piezoelectric microvalve

Valves and valve actuation – Electrically actuated valve – Having element dimensionally responsive to field

Reexamination Certificate

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Reexamination Certificate

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06988706

ABSTRACT:
A piezoelectric microvalve and method for controlling a fluid flow through a piezoelectric microvalve are provided. The microvalve includes an inlet plenum and a flow directing structure for directing a fluid flow, wherein a first side of the structure is in fluid communication with the inlet plenum. The microvalve also includes a piezoelectric bending actuator comprising a flap portion responsive to a command signal for controlling a fluid flow through the flow directing structure. The microvalve further includes an outlet plenum in fluid communication with a second side of the flow directing structure.

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