Piezoelectric microspeaker using microelectromechanical...

Details Piezoelectric microspeaker using microelectromechanical... Piezoelectric microspeaker using microelectromechanical...

2008-09-29

2010-10-12

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S365000, C216S041000

Reexamination Certificate

active

07812505

ABSTRACT:
A piezoelectric microspeaker using microelectromechanical systems (MEMS) and a method of manufacturing the same are provided. The piezoelectric microspeaker includes a piezoelectric layer disposed on an elastic thin layer, and a resonance change unit patterned on one of a bottom surface of the elastic thin layer and a top surface of the piezoelectric layer.

REFERENCES:
patent: 3418436 (1968-12-01), Neumann
patent: 4783821 (1988-11-01), Muller et al.
patent: 4816125 (1989-03-01), Muller et al.
patent: 4885781 (1989-12-01), Seidel
patent: 6668190 (2003-12-01), Iezzi et al.
patent: 6924584 (2005-08-01), Buhler et al.
patent: 7089638 (2006-08-01), Yi et al.
patent: 7301212 (2007-11-01), Mian et al.
patent: RE40781 (2009-06-01), Johannsen et al.
patent: 2003/0048914 (2003-03-01), Yi et al.
patent: 2005/0213785 (2005-09-01), Koura et al.
patent: 2005/0248238 (2005-11-01), Yamada et al.
patent: 2006/0284516 (2006-12-01), Shimaoka et al.
patent: 2007/0090731 (2007-04-01), Namba et al.
patent: 8-084396 (1996-03-01), None
patent: 2005-051689 (2005-02-01), None
patent: 1020040011035 (2004-02-01), None
patent: 1020060093464 (2006-08-01), None
patent: 1020070082087 (2007-08-01), None
patent: WO2007/078646 (2007-07-01), None
Eunki Hong et al., “Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodes”, 2004 Elsevier B.V., Sensors and Actuators A 119 (2005) pp. 520-526.

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