Piezoelectric micromotion actuator

Details Piezoelectric micromotion actuator Piezoelectric micromotion actuator

1983-12-29

1986-03-18

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

350487, 356345, H01L 4108

Patent

active

045771316

ABSTRACT:
Apparatus is disclosed for supporting an optical element which can move the element in an extremely precise, tilt-free translation in a straight line over a distance of one-half a wavelength of visible light. The invention comprises in one embodiment a piezoelectric transducer mechanically coupled to a flexure tube using hardened conical points.

REFERENCES:
patent: 3360665 (1967-12-01), Boswell
patent: 4011474 (1977-03-01), O'Neill
patent: 4160184 (1979-07-01), Ljung
patent: 4342935 (1982-08-01), Kallmeyer et al.
patent: 4382243 (1983-05-01), Babitzka et al.
patent: 4408832 (1983-10-01), Hartman et al.

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