Piezoelectric micromachined ultrasonic transducer with...

Details Piezoelectric micromachined ultrasonic transducer with... Piezoelectric micromachined ultrasonic transducer with...

2005-03-02

2008-11-11

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S322000, C310S334000, C310S365000

Reexamination Certificate

active

07449821

ABSTRACT:
A piezoelectric micromachined ultrasonic transducer comprising a substrate and a first dielectric film formed on the substrate. An opening having a sidewall is formed through the substrate and first dielectric film. A bottom electrode is formed on the first dielectric film spanning the opening. A piezoelectric element is formed on the bottom electrode. A second dielectric film surrounds the piezoelectric element. A conformal insulating film is formed on the sidewall of the opening. A conformal conductive film is formed in contact with the bottom electrode and on the sidewall of the opening, wherein an open cavity is maintained in the opening. A top electrode is formed in contact with the piezoelectric element.

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