Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2011-08-09
2011-08-09
Williams, Hezron (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
07992431
ABSTRACT:
The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65—(PbTiO3)0.35(PMN0.65-PT0.35)(PMN-PT), zirconate titanate (PZT)/SiO2or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10 μm. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.
REFERENCES:
patent: 3205464 (1965-09-01), Schwartz
patent: 4093883 (1978-06-01), Yamamoto
patent: 4302694 (1981-11-01), Fujishima et al.
patent: 4349762 (1982-09-01), Kitamura et al.
patent: 4363993 (1982-12-01), Nishigaki et al.
patent: 4528502 (1985-07-01), Rocha
patent: 4649312 (1987-03-01), Robin et al.
patent: 4802371 (1989-02-01), Calderara et al.
patent: 5054323 (1991-10-01), Hubbard et al.
patent: 5313535 (1994-05-01), Williams
patent: 5334835 (1994-08-01), Nakayama et al.
patent: 5382864 (1995-01-01), Morikawa et al.
patent: 5445008 (1995-08-01), Wachter et al.
patent: 5475318 (1995-12-01), Marcus et al.
patent: 5503010 (1996-04-01), Yamanaka
patent: 5553486 (1996-09-01), Bonin
patent: 5689063 (1997-11-01), Fujiu et al.
patent: 5719324 (1998-02-01), Thundat et al.
patent: 5780727 (1998-07-01), Gimzewski et al.
patent: 5807758 (1998-09-01), Lee et al.
patent: 5866807 (1999-02-01), Elings et al.
patent: 5874126 (1999-02-01), Kahn et al.
patent: 5948993 (1999-09-01), Ting et al.
patent: 5966787 (1999-10-01), Nakayama et al.
patent: 5996412 (1999-12-01), Hansen
patent: 6075585 (2000-06-01), Minne et al.
patent: 6278379 (2001-08-01), Allen et al.
patent: 6280396 (2001-08-01), Clark
patent: 6289717 (2001-09-01), Thundat et al.
patent: 6336366 (2002-01-01), Thundat et al.
patent: 6422069 (2002-07-01), Shimizu et al.
patent: 6458327 (2002-10-01), Vossmeyer
patent: 6465368 (2002-10-01), Inoue et al.
patent: 6589727 (2003-07-01), Klenerman et al.
patent: 6621080 (2003-09-01), Yamamoto
patent: 6734425 (2004-05-01), Hantschel et al.
patent: 6781285 (2004-08-01), Lazarus et al.
patent: 6903491 (2005-06-01), Irie et al.
patent: 6992421 (2006-01-01), Ikeda et al.
patent: 7055378 (2006-06-01), Su et al.
patent: 7083270 (2006-08-01), Torii et al.
patent: 7084554 (2006-08-01), Xu et al.
patent: 7104134 (2006-09-01), Amano et al.
patent: 7195909 (2007-03-01), Klenerman et al.
patent: 7263874 (2007-09-01), Fitch et al.
patent: 7497133 (2009-03-01), Shih et al.
patent: 7744773 (2010-06-01), Shih et al.
patent: 2002/0094528 (2002-07-01), Salafsky
patent: 2002/0117659 (2002-08-01), Lieber et al.
patent: 2002/0155303 (2002-10-01), Wielstra et al.
patent: 2003/0032293 (2003-02-01), Kim et al.
patent: 2003/0068655 (2003-04-01), Bottomley et al.
patent: 2003/0194697 (2003-10-01), Klenerman et al.
patent: 2003/0224551 (2003-12-01), Kim et al.
patent: 2003/0235681 (2003-12-01), Sebastian et al.
patent: 2004/0022677 (2004-02-01), Wohlstadter et al.
patent: 2004/0265664 (2004-12-01), Badding et al.
patent: 2005/0112621 (2005-05-01), Kim et al.
patent: 2005/0114045 (2005-05-01), Giurgiutiu et al.
patent: 2005/0199047 (2005-09-01), Adams et al.
patent: 2005/0277852 (2005-12-01), Shih et al.
patent: 2005/0287680 (2005-12-01), Venkatasubbarao et al.
patent: 2006/0053870 (2006-03-01), Berndt
patent: 2006/0217893 (2006-09-01), Li et al.
patent: 2006/0228657 (2006-10-01), Masters et al.
patent: 2006/0257286 (2006-11-01), Adams
patent: 2007/0089515 (2007-04-01), Shih et al.
patent: 2007/0141721 (2007-06-01), Vafai et al.
patent: 2007/0169553 (2007-07-01), Mutharasan et al.
patent: 2007/0218534 (2007-09-01), Klenerman et al.
patent: 2008/0034840 (2008-02-01), Mutharasan
patent: 2008/0035180 (2008-02-01), Mutharasan
patent: 2009/0053709 (2009-02-01), Mutharasan
patent: 2009/0078023 (2009-03-01), Mutharasan
patent: 2009/0203000 (2009-08-01), Mutharasan
patent: 2010/0068697 (2010-03-01), Shih et al.
patent: 2010/0224818 (2010-09-01), Shih et al.
patent: 0631319 (1994-12-01), None
patent: 0631319 (1994-12-01), None
patent: 1536227 (2005-06-01), None
patent: 98/50773 (1998-11-01), None
patent: 9850773 (1998-11-01), None
patent: 2004/061991 (2004-07-01), None
patent: 2005/043126 (2005-05-01), None
patent: 2006/031072 (2006-03-01), None
patent: 2007/087328 (2007-08-01), None
patent: WO 2007/109228 (2007-09-01), None
patent: 2007/133619 (2007-11-01), None
patent: 2008/020903 (2008-02-01), None
patent: 2008/021187 (2008-02-01), None
patent: 2008/021189 (2008-02-01), None
patent: 2008/101199 (2008-08-01), None
patent: 2009/014830 (2009-01-01), None
patent: 2009/035732 (2009-03-01), None
patent: 2009/035732 (2009-03-01), None
Lee, C. et al., “Sol-gel derived PZT force sensor for scanning force microscopy”, Mater. Chem. Phys., 44: 25-29 (1996).
Lee, C. et al., “Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities”, Sensors and Actuators, A72: 179-188 (1999).
Lee, J. H. et al., “Label free novel electrical detection using micromachined PZT monolithic thin film cantilever for the detection of C-reactive protein”, Biosensors and Bioelectronics, 20: 269-275 (2004).
Lee, J. H. et al., “Effect of mass and stress on resonant frequency shift of functionalized Pb(Zr0.52Ti0.48)O3 thin film microcantilever for the detection of C-reactive protein”, Appl. Phys. Lett., 84(16): 3187-3189 (2004).
Lee, J. H. et al., “Immunnoassay of prostate-specific antigen (PSA) using resonant frequency shift of piezoelectric nanomechanical microcantilever”, Biosensors and Bioelectronics, 20: 2157-2162 (2005).
Lee, S. S. et al., “Self-Excited Piezoelectric Cantilever Oscillators”, The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden: 417-420 (1995).
Lee, Y. et al., “A Piezoelectric Micro-Cantilever Bio-Sensor Using the Mass-Microbalancing Technique With Self-Excitation”, The 13th International Conference on Solid-State Sensors, Actuators, and Microsystems, Seoul, Korea: 644-647 (2005).
Li, S. et al., “The intrinsic nature of nonlinear behavior observed in lead zirconate titanate ferroelectric ceramic”, J. Appl. Phys., 69(10): 7219-7224 (1991).
Li, X. et al., “Detection of water-ice transition using a lead zirconate titanate/brass transducer”, J. Appl. Phys., 92(1): 106-111 (2002).
Lin, Z. et al., “Operation of an Ultrasensitive 30-MHz Quartz Crystal Microbalance in Liquids”, Anal. Chem., 65(11): 1546-1551 (1993).
Liu, W. et al., “Preparation and orientation control of Pb1.1(Zr0.3Ti0.7)O3 thin films by a modified sol-gel process”, Mat. Lett., 46: 239-243 (2000).
Luo, H. et al., “Synthesis of PMN and 65PMN-35PT Ceramics and Films by a New Suspension Method”, Perovskite, Piezoelectric, and Dielectric Ceramics: 251-260.
Luo, H. et al., “Comparison in the Coating of Mg(OH)2 on Micron-Sized and Nanometer-Sized Nb2O5 Particles”, Int. J. Appl. Ceram. Technol., 1(2): 146-154 (2004).
Luo, H., “Colloidal Processing of PMN-PT Thick Films For Piezoelectric Sensor Applications”, A Thesis Submitted to the Faculty of Drexel University in Jun. 2005.
Maki, K. et al., “Evaluation of Pb(Kr,Ti)O3 Films Derived from Propylene-Glycol-Based Sol-Gel Solutions”, Jpn. J. Appl. Phys., 39(9B): 5421-5425 (2000).
Maraldo, D. et al., “Resonant-mode millimeter sized cantilever biosensor for continuous detection of proteins and pathogens in flowing liquids,” Dept. of Chem. and Biological Eng., 1-21.
Matsui, Y. et al., “Highly Oxidation-Resistant TiN Barrier Layers for Ferroelectric Capa
Shen Zuyan
Shih Wan Y.
Shih Wei-Heng
Zhu Qing
Drexel University
Frank Rodney T
Knoble Yoshida & Dubleavy, LLC
Williams Hezron
LandOfFree
Piezoelectric microcantilevers and uses in atomic force... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Piezoelectric microcantilevers and uses in atomic force..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric microcantilevers and uses in atomic force... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2687555