Piezoelectric member element and liquid discharge head...

Details Piezoelectric member element and liquid discharge head... Piezoelectric member element and liquid discharge head...

2007-06-26

2007-06-26

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000

Reexamination Certificate

active

11196260

ABSTRACT:
A piezoelectric member element including a piezoelectric member layer and a pair of electrode layers sandwiching the piezoelectric member layer, wherein at least three layers, which are directed in a preferential orientation to the (110) plane on the (100) plane of Si, are accumulated and the above described at least three layers include the above described piezoelectric member layer and one of the above described pair of electrode layers.

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