Piezoelectric inkjet printhead and method of manufacturing...

Details Piezoelectric inkjet printhead and method of manufacturing... Piezoelectric inkjet printhead and method of manufacturing...

2010-08-09

2011-10-18

Luu, Matthew (Department: 2861)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C347S071000

Reexamination Certificate

active

08037605

ABSTRACT:
Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.

REFERENCES:
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patent: 2007/0176979 (2007-08-01), Chung et al.
patent: 2008/0074474 (2008-03-01), Yoo et al.
patent: 2008/0309736 (2008-12-01), Wee et al.
patent: 2009/0009565 (2009-01-01), Oh et al.
patent: 06-956 (1994-01-01), None
patent: 10-2007-0078201 (2007-07-01), None
patent: 10-2007-0079412 (2007-08-01), None
KR Office Action issued Jun. 24, 2011 in KR Patent Application No. 10-2007-0105790.

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