Piezoelectric ink jet print head and fabrication method for...

Details Piezoelectric ink jet print head and fabrication method for... Piezoelectric ink jet print head and fabrication method for...

2006-01-03

2006-01-03

Bryant, David P. (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C216S027000, C347S068000

Reexamination Certificate

active

06981300

ABSTRACT:
A piezoelectric ink jet print head and a fabrication method for a pressure chamber thereof. A silicon substrate has at least one large-size opening. A photoresist layer is formed in the large-size opening of the silicon substrate and has a plurality of small-size trenches spaced apart from each other. Each of the small-size trenches serves as a pressure chamber. An adhesion layer is formed overlying the silicon substrate to cover the photoresist layer and the small-size trenches. A silicon layer is formed overlying the adhesion layer to serve as a vibrating layer.

REFERENCES:
patent: 5581861 (1996-12-01), Lee et al.
patent: 6096656 (2000-08-01), Matzke et al.
patent: 6334670 (2002-01-01), Yoshihira et al.
patent: 6701593 (2004-03-01), Lin et al.

Affiliated with

Also associated with

Rating

Piezoelectric ink jet print head and fabrication method for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric ink jet print head and fabrication method for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric ink jet print head and fabrication method for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3544752