Piezoelectric filter, duplexer, composite piezoelectric...

Details Piezoelectric filter, duplexer, composite piezoelectric... Piezoelectric filter, duplexer, composite piezoelectric...

2006-03-28

2006-03-28

Tran, Anh Q. (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C333S191000

Reexamination Certificate

active

07019604

ABSTRACT:
A piezoelectric filter and other electronic components are constructed such that the accuracy of frequency adjustment can be increased and an improvement in efficiency of the adjustment operation can be achieved. The piezoelectric filter includes a plurality of piezoelectric resonators including a substrate and a vibration portion provided on the substrate, the vibration portion having a structure in which the top and bottom surfaces of a thin film portion including at least one piezoelectric thin film are sandwiched between at least a pair of an upper electrode and a lower electrode facing each other, wherein the upper electrode of a predetermined piezoelectric resonator is made of a material having susceptibility to etching that is different from that of the upper electrode of the other piezoelectric resonator.

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