Piezoelectric film device, and driving method of the same

Details Piezoelectric film device, and driving method of the same Piezoelectric film device, and driving method of the same

2007-10-30

2007-10-30

San Martin, J. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S363000, C310S364000, C310S365000, C310S366000

Reexamination Certificate

active

11013994

ABSTRACT:
A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.

REFERENCES:
patent: 4336510 (1982-06-01), Miyamori
patent: 5233256 (1993-08-01), Hayashi et al.
patent: 1-101673 (1989-04-01), None
patent: 3-256375 (1991-11-01), None
patent: 2002-279742 (2002-09-01), None
I. Kanno et al., “Measurement of transverse piezoelectric properties of PZT thin films”, Sensors and Actuators A: Physical, vol. 107, Issue 1, Oct. 1, 2003, pp. 68-74.

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