Piezoelectric element, method for fabricating the same,...

Details Piezoelectric element, method for fabricating the same,... Piezoelectric element, method for fabricating the same,...

2007-03-20

2007-03-20

Meier, Stephen (Department: 2861)

Optical: systems and elements

Holographic system or element

Having defined page composer

C347S071000

Reexamination Certificate

active

10997143

ABSTRACT:
A piezoelectric element includes a first electrode film; a piezoelectric layered film including a first piezoelectric thin film formed on the first electrode film and a second piezoelectric thin film formed on the first piezoelectric thin film; and a second electrode film formed on the second piezoelectric thin film. Each of the first and second piezoelectric thin films is an aggregate of columnar grains grown unidirectionally along the thickness direction of the piezoelectric layered film. The Pb content of the first piezoelectric thin film is smaller than the Pb content of the second piezoelectric thin film. A columnar grain of the second piezoelectric thin film has a larger average cross-sectional diameter than an average cross-sectional diameter of a columnar grain of the first piezoelectric thin film. A ratio of the thickness of the piezoelectric layered film to the average cross-sectional diameter of the second piezoelectric thin film is not less than 20 and not more than 60.

REFERENCES:
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R. Ramesh and D.G. Schlom, Materials Science: Orienting Ferroelectric Films, Science Magazine, vol. 296 No. 5575, pp. 1975-1976, online article, paragraph 6 lines 1-3 and paragraph 7.

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