Piezoelectric element, liquid jetting head, and method for...

Details Piezoelectric element, liquid jetting head, and method for... Piezoelectric element, liquid jetting head, and method for...

2005-04-26

2005-04-26

Meier, Stephen D. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S071000

Reexamination Certificate

active

06883901

ABSTRACT:
The present invention provides a piezoelectric element having consistently high piezoelectric characteristics, and a method for manufacturing a liquid jetting head in which this element is used, by obtaining a degree of orientation that is suitable for a piezoelectric thin film, stably and with good reproducibility. A Ti film is formed on a layered bottom electrode42, piezoelectric material layers constituting a piezoelectric thin film43is formed a plurality of cycles of layer formation, and a top electrode44is formed on the piezoelectric thin film43to produce a piezoelectric element40. When the piezoelectric material layers are formed, the annealing temperature of the first cycle of layer formation is set higher than the annealing temperature of the other cycles of layer formation. In addition, the annealing time of the first cycle of layer formation is made longer than the annealing time of the other cycles of layer formation. The degree of orientation in the 100 plane is thereby increased, and the bottom electrode can be prevented from undergoing oxidation or Pd diffusion.

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patent: 2000-22232 (2000-01-01), None

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