Piezoelectric element, liquid ejection head and process for...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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C347S068000

Reexamination Certificate

active

10497456

ABSTRACT:
A piezoelectric element comprises a diaphragm30, a lower electrode42dformed in a prescribed pattern on the diaphragm, a piezoelectric film43formed on the lower electrode, and upper electrodes44formed on the piezoelectric film. A metallic layer42belectrically disconnected from the upper electrodes and the lower electrode is formed on the diaphragm in the vicinity of the piezoelectric film. The gap between the lower electrode and the metallic layer is no more than 200 μm. In this way, excellent crystallinity of the piezoelectric film can be achieved also in the vicinity of the edges of the lower electrode, thereby making it possible to provide piezoelectric elements and a liquid discharge head that can withstand high voltage and are of better reliability.

REFERENCES:
patent: 6336717 (2002-01-01), Shimada et al.
patent: 0 963 846 (1999-12-01), None
patent: 963846 (1999-12-01), None
patent: 976560 (2000-02-01), None
patent: 10-93045 (1998-04-01), None
patent: 2000-198197 (2000-07-01), None
patent: 2000-211134 (2000-08-01), None
patent: 2000-326503 (2000-11-01), None

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