Piezoelectric element, ink jet recording head and producing...

Details Piezoelectric element, ink jet recording head and producing... Piezoelectric element, ink jet recording head and producing...

2008-07-15

2008-07-15

Meier, Stephen D (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S070000, C310S363000

Reexamination Certificate

active

10928277

ABSTRACT:
A piezoelectric element including a vibrating plate, a lower electrode, a piezoelectric film and an upper electrode laminated in this order, wherein the lower electrode, the upper electrode and the piezoelectric film are formed by a perovskite type oxide while the vibrating plate is formed by a metal oxide, and a junction interface is substantially absent between the vibrating plate and the lower electrode, between the lower electrode and the piezoelectric film and between the piezoelectric film and the upper electrode.

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