Piezoelectric element, ink jet head, angular velocity...

Details Piezoelectric element, ink jet head, angular velocity... Piezoelectric element, ink jet head, angular velocity...

2007-03-06

2007-03-06

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C310S360000, C310S363000, C310S370000

Reexamination Certificate

active

11409469

ABSTRACT:
In a piezoelectric element20,a first electrode layer2made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate1,and a piezoelectric layer3made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer2so that the piezoelectric layer3is preferentially oriented along the (001) plane.

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