Piezoelectric element, ink jet head, angular velocity...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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Reexamination Certificate

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06969157

ABSTRACT:
A piezoelectric element includes a first electrode layer14provided on a substrate11and made of a noble metal to which at least one additive selected from the group consisting of Mg, Ca, Sr, Ba, Al and oxides thereof is added, an orientation control layer15provided on the first electrode layer14and made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane, and a piezoelectric layer16provided on the orientation control layer15and made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane.

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patent: 2001332041 (2001-11-01), None
R. Takayama et al.; “Preparation of epitaxial Pb(ZrxTi1-x)O3thin films and their crystallographic, pyroelectric, and ferroelectric properties”; Journal of Applied Physics; vol. 65, No. 4; Feb. 15, 1989; pp. 1666-1670.
P. Muralt et al.; “Texture control of Pb(Z1Ti) TiO3thin films with TiO2Seeding”; Journal of Applied Physics; vol. 83, No. 7; Apr. 1, 1998; pp. 3835-3841.

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