Piezoelectric element and manufacturing method thereof,...

Details Piezoelectric element and manufacturing method thereof,... Piezoelectric element and manufacturing method thereof,...

2007-03-19

2010-06-08

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S364000, C310S365000

Reexamination Certificate

active

07732997

ABSTRACT:
Providing a manufacturing method of a piezoelectric element by which even if an electrode and a piezoelectric film stacked on a substrate are baked at a high temperature, the electrode does not oxidize and mutual diffusion between the substrate, the electrode and the piezoelectric film may be suppressed. The electrode is adapted as a laminated layer body which includes an electroconductive oxide layer, a mixture layer having an electroconductive oxide and electroconductive metal, and an electroconductive metal layer including the electroconductive metal from a substrate side, and the mixture layer above is adapted as a graded composition structure in which a ration of the electroconductive oxide is highest in an interface with the electroconductive oxide layer and lowest in an interface with the electroconductive metal layer.

REFERENCES:
patent: 6783800 (2004-08-01), Saito et al.
patent: 7262544 (2007-08-01), Aoki et al.
patent: 2002/0097305 (2002-07-01), Sumi
patent: 2002/0140320 (2002-10-01), Unno et al.
patent: 2005/0213020 (2005-09-01), Takeda et al.
patent: 2005/0218488 (2005-10-01), Matsuo
patent: 1636729 (2005-07-01), None
patent: 8-274573 (1996-10-01), None
patent: 2000-328223 (2000-11-01), None
patent: 2001-152360 (2001-06-01), None
patent: 2002-16229 (2002-01-01), None
Official Action dated Jan. 16, 2009 in Chinese Application No. 200710091634.2.

Affiliated with

Also associated with

Rating

Piezoelectric element and manufacturing method thereof,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric element and manufacturing method thereof,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric element and manufacturing method thereof,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4160070