Piezoelectric element, actuator device, liquid ejecting head...

Details Piezoelectric element, actuator device, liquid ejecting head... Piezoelectric element, actuator device, liquid ejecting head...

2007-08-07

2010-06-08

Feggins, K. (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

Reexamination Certificate

active

07731339

ABSTRACT:
A piezoelectric element includes a lower electrode film disposed on a substrate, a piezoelectric layer70disposed on the lower electrode film, a upper electrode film80disposed on the piezoelectric layer70, wherein the piezoelectric layer70is formed of a plurality of columnar grains70a, and the upper electrode film80conforms to the surface shape of each of the grains70aof the piezoelectric layer70.

REFERENCES:
patent: 2002/0097305 (2002-07-01), Sumi
patent: 2006/0170736 (2006-08-01), Tomozawa et al.
patent: 2007/0097182 (2007-05-01), Kubota et al.
patent: 11-151815 (1999-06-01), None

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