Piezoelectric/electrostrictive device

Details Piezoelectric/electrostrictive device Piezoelectric/electrostrictive device

2005-02-22

2005-02-22

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S332000

Reexamination Certificate

active

06858971

ABSTRACT:
A piezoelectric/electrostrictive device has a piezoelectric/electrostrictive element which is formed on a ceramic substrate. The ceramic substrate includes a plate section, a movable section, and a fixed section. The piezoelectric/electrostrictive element has one electrode and the other electrode which are alternately stacked to give a comb-shaped cross section while the one electrode and the other electrode are superimposed with each other with piezoelectric/electrostrictive layers interposing therebetween. The first layer of the piezoelectric/electrostrictive layers includes a first portion of a first piezoelectric/electrostrictive material formed over a region ranging from a part of the thin plate section to a part of the fixed section, and a second portion of a second piezoelectric/electrostrictive material formed on another part of the fixed section.

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