Piezoelectric/electrostrictive actuator having ceramic substrate

Details Piezoelectric/electrostrictive actuator having ceramic substrate Piezoelectric/electrostrictive actuator having ceramic substrate

1991-07-23

1993-05-11

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310324, 310358, 310359, 310346, H01L 4108

Patent

active

052104559

ABSTRACT:
A piezoelectric/electrostrictive actuator including a ceramic substrate (2, 10, 16, 22, 38) and a piezoelectric/electrostrictive portion (26, 28, 29, 30, 33a, 33b, 36a, 36b, 37, 39). The ceramic substrate has at least one recess (6, 14, 20, 24, 42) having a bottom surface which defines a thin-walled portion (8a, 22a), and the piezoelectric/electrostrictive portion is formed on the thin-walled portion of the ceramic substrate.

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