Piezoelectric elastic surface wave element with film of tantalum

Details Piezoelectric elastic surface wave element with film of tantalum Piezoelectric elastic surface wave element with film of tantalum

1985-09-23

1986-10-14

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313B, 333195, H01L 4108

Patent

active

046174877

ABSTRACT:
An elastic surface wave element which has a grille-shaped electrode formed on a piezoelectric substrate is improved by having the grille-shaped electrode portion thereof covered with an insulating film made of tantalum pentoxide or silicon nitride. The insulating film functions to minimize the degradation of properties suffered by the conventional elastic surface wave element and preclude substantially completely the phenomenon of short-circuit between the electrode bars of the grille-shaped electrode.

REFERENCES:
patent: 3991330 (1976-11-01), Isaacs et al.
patent: 4028648 (1977-06-01), Hartmann et al.
patent: 4081769 (1978-03-01), Shreve

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