Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Reexamination Certificate
2008-02-27
2011-10-18
Norton, Nadine G (Department: 1713)
Etching a substrate: processes
Forming or treating electrical conductor article
Forming or treating of groove or through hole
C438S042000, C438S692000
Reexamination Certificate
active
08038890
ABSTRACT:
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
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Abe Kazuhide
Kawakubo Takashi
Nagano Toshihiko
Nishigaki Michihiko
Duclair Stephanie
Kabushiki Kaisha Toshiba
Norton Nadine G
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
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