Piezoelectric driven MEMS device

Details Piezoelectric driven MEMS device Piezoelectric driven MEMS device

2007-03-19

2009-11-17

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000, C310S331000, C310S367000

Reexamination Certificate

active

07619349

ABSTRACT:
It is made possible to provide a piezoelectric driven MEMS device having the distance between the action end and the fixed electrode which is kept constant regardless of whether the residual strain is large or small and having a mechanism which is excellent in reproducibility and reliability. Two piezoelectric driven actuators each having a folded beam structure are disposed in parallel and in a line-symmetric manner, and connected to each other in the vicinity of an action end.

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