Piezoelectric device, its manufacturing method, liquid...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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C347S020000, C347S040000, C347S047000, C347S048000, C347S050000, C347S071000, C347S072000

Reexamination Certificate

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07874653

ABSTRACT:
A piezoelectric device includes a substrate composed of a (110) single crystal silicon, a driver IC formed in the substrate, and a piezoelectric device that is formed above the substrate and is driven by the driver IC, wherein the driver IC has an analog switch including a transistor, the transistor having a channel direction in <001> orientation of the substrate.

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patent: 6984843 (2006-01-01), Higuchi et al.
patent: 7448731 (2008-11-01), Murata
patent: 7448733 (2008-11-01), Murata et al.
patent: 2003/0156163 (2003-08-01), Watanabe et al.
patent: 11-010881 (1999-01-01), None
patent: 2001-270113 (2001-10-01), None
patent: 2004-017600 (2004-01-01), None
patent: 2004-160711 (2004-06-01), None
patent: 2006-272659 (2006-10-01), None

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