Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-06-19
2007-06-19
Pert, Evan (Department: 2826)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S31300R, C029S025350
Reexamination Certificate
active
10516333
ABSTRACT:
The present invention has an objective to provide a high performance piezoelectric element in which is formed an aluminum nitride thin film free from hillocks, cracks, and peeling which exhibits superhigh c-axis orientation, by forming a bottom electrode from a W layer with no intervening adhesive layer on a glass or other cheap substrate. The piezoelectric element of the present invention is a piezoelectric element using a superhigh-oriented aluminum nitride thin film characterized in that the piezoelectric element is free from hillocks, cracks, and peeling and includes a stack structure in which a bottom electrode, a piezoelectric body thin film, and a top electrode are sequentially formed on a substrate; the bottom electrode is made of an oriented W layer of which a (111) plane of W is parallel to a surface of the substrate; and the piezoelectric body thin film is formed of a c-axis-oriented aluminum nitride thin film having a rocking curve full width half maximum (RCFWHM) not exceeding 2.5°.
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Akiyama Morito
Jinushi Keiichiro
Sunagawa Yoshitaka
Tateyama Hiroshi
Ueno Naohiro
National Institute of Advanced Industrial Science & Technol
Nixon & Vanderhye PC
Pert Evan
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