Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-07-10
2007-07-10
Martin, J. San (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S324000, C310S363000, C310S364000, C310S365000, C310S366000
Reexamination Certificate
active
10979276
ABSTRACT:
A piezoelectric device of the present invention includes first and second piezoelectric resonators. The first piezoelectric resonator has a structure in which a cavity, a lower electrode, a piezoelectric layer, and an upper electrode are formed on a substrate. The second piezoelectric resonator has a structure in which a cavity, a lower electrode, a piezoelectric layer, and an upper electrode are formed on the substrate. A feature of the above-structure piezoelectric device is that the piezoelectric layers, have the same film thickness, and the depth of the cavity of the first piezoelectric resonator is different from the depth of the cavity of the second piezoelectric resonator.
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Hiroshi Nakatsuka et al., U.S. Appl. No. 10/979,420, filed Nov. 3, 2004.
Hiroshi Yamaguchi et al., U.S. Appl. No. 10/979,277, filed Nov. 3, 2004.
Nakamura Hiroyuki
Nakatsuka Hiroshi
Onishi Keiji
Yamaguchi Hiroshi
Yamakawa Takehiko
Martin J. San
Matsushita Electric - Industrial Co., Ltd.
Wenderoth , Lind & Ponack, L.L.P.
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