Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2009-03-17
2011-11-08
Rosenau, Derek (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Reexamination Certificate
active
08053955
ABSTRACT:
A piezoelectric device includes a lower electrode, a piezoelectric film and an upper electrode laminated in this order on a support. An oxide film containing a material that forms a lower electrode is formed on a side surface of the piezoelectric film. The piezoelectric device is produced such that an upper electrode and a piezoelectric film are patterned by dry-etching through a mask formed on a side of the upper electrode of the piezoelectric device member and thereafter a side surface of the patterned piezoelectric film (a film adhered to a side wall) is oxidized to form an oxide film.
REFERENCES:
patent: 6142614 (2000-11-01), Hashizume et al.
patent: 2006/0208618 (2006-09-01), Murai et al.
patent: 2007/0194662 (2007-08-01), Sano et al.
patent: 2008/0231146 (2008-09-01), Izumi et al.
patent: 8-181126 (1996-07-01), None
patent: 10-211701 (1998-08-01), None
patent: 2000-22090 (2000-01-01), None
patent: 2000-183287 (2000-06-01), None
patent: 2007-276384 (2007-10-01), None
Mochizuki Fumihiko
Takahashi Shuji
Birch & Stewart Kolasch & Birch, LLP
Fujifilm Corporation
Rosenau Derek
LandOfFree
Piezoelectric device and method of production thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Piezoelectric device and method of production thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric device and method of production thereof will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4299177