Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-07-12
2011-07-12
Dougherty, Thomas M (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C252S06290R, C252S06290R, C257S347000, C501S134000
Reexamination Certificate
active
07977853
ABSTRACT:
A piezoelectric device having a piezoelectric film formed over a substrate through an electrode by vapor phase deposition using plasma, and constituted by columnar crystals of one or more perovskite oxides Pb(Tix, Zry, Mz)O3(0<x<1, 0<y<1, 0≦z<1, x+y+z=1) which extend nonparallel to the substrate. M represents one or more of Sn, Nb, Ta, Mo, W, Ir, Os, Pd, Pt, Re, Mn, Co, Ni, V, and Fe. The maximum diameters of the end faces of the columnar crystals are distributed from a value not exceeding 100 nm to a value of 500 nm or greater. The arithmetic average surface roughness of the columnar film is 10 nm or smaller, 20% or more of the columnar crystals have the maximum diameters not exceeding 100 nm, and 5% or more of the columnar crystals have the maximum diameters of 500 nm or greater.
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Office Action issued in Chinese Patent Application No. 200810130877.7 on Apr. 2, 2011.
Fujii Takamichi
Naono Takayuki
Birch & Stewart Kolasch & Birch, LLP
Dougherty Thomas M
FUJIFILM Corporation
Gordon Bryan P
LandOfFree
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