Piezoelectric crystalline film of zinc oxide and method for maki

Stock material or miscellaneous articles – Composite – Of quartz or glass

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428469, 428492, 428539, 427100, 252 629, 204192SP, C23C 1500, C04B 3500

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active

041744217

ABSTRACT:
Piezoelectric crystalline film of zinc oxide with a hexagonal crystal structure and a c-axis substantially perpendicular to the film surface, the crystalline film containing, as additive elements, vanadium and manganese together with or without copper. The piezoelectric crystalline films have high resistivity and a smooth surface, and make it possible to produce piezoelectric transducers with good conversion efficiency which can be used in a wide range of low to high frequencies. Such films can be made by a method comprising sputtering source materials, i.e., zinc oxide, vanadium and manganese together with or without copper onto a surface of a substrate to form a crystalline zinc oxide film, the sputtering being effected by using a film material source consisting essentially of a ceramic of zinc oxide containing vanadium, and manganese together with or without copper.

REFERENCES:
patent: 3420763 (1969-01-01), Polito et al.
patent: 3573960 (1971-04-01), Duncan
patent: 3766041 (1973-10-01), Wasa et al.
patent: 3988232 (1976-10-01), Wasa et al.

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