Stock material or miscellaneous articles – Composite – Of quartz or glass
Patent
1978-09-07
1979-11-13
Cooper, Jack
Stock material or miscellaneous articles
Composite
Of quartz or glass
428469, 428492, 428539, 427100, 252 629, 204192SP, C23C 1500, C04B 3500
Patent
active
041744217
ABSTRACT:
Piezoelectric crystalline film of zinc oxide with a hexagonal crystal structure and a c-axis substantially perpendicular to the film surface, the crystalline film containing, as additive elements, vanadium and manganese together with or without copper. The piezoelectric crystalline films have high resistivity and a smooth surface, and make it possible to produce piezoelectric transducers with good conversion efficiency which can be used in a wide range of low to high frequencies. Such films can be made by a method comprising sputtering source materials, i.e., zinc oxide, vanadium and manganese together with or without copper onto a surface of a substrate to form a crystalline zinc oxide film, the sputtering being effected by using a film material source consisting essentially of a ceramic of zinc oxide containing vanadium, and manganese together with or without copper.
REFERENCES:
patent: 3420763 (1969-01-01), Polito et al.
patent: 3573960 (1971-04-01), Duncan
patent: 3766041 (1973-10-01), Wasa et al.
patent: 3988232 (1976-10-01), Wasa et al.
Mashio Tasuku
Nishiyama Hiroshi
Ogawa Toshio
Cooper Jack
Murata Manufacturing Co. Ltd.
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