Piezoelectric crystalline film of zinc oxide and method for maki

Details Piezoelectric crystalline film of zinc oxide and method for maki Piezoelectric crystalline film of zinc oxide and method for maki

1978-09-14

1980-10-21

Ansher, Harold

Stock material or miscellaneous articles

Metal continuous phase interengaged with nonmetal continuous...

204192R, 204298, 252 629, 310313A, 357 10, 357 60, 428913, H01L 4118, C23C 1500, B32B 900

Patent

active

042295068

ABSTRACT:
Piezoelectric crystalline film on a substrate, which is a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, the crystalline zinc oxide film containing, as an additive element, uranium. The piezoelectric crystalline films have high resistivity and a smooth surface, and make it possible to produce piezoelectric transducers with good conversion efficiency. Such films are made by sputtering zinc oxide and uranium onto a substrate from a film material source consisting essentially of a ceramic of zinc oxide containing uranium.

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