Piezoelectric crystalline film of zinc oxide and method for maki

Details Piezoelectric crystalline film of zinc oxide and method for maki Piezoelectric crystalline film of zinc oxide and method for maki

1978-09-07

1980-05-27

Cooper, Jack

Stock material or miscellaneous articles

Composite

204192SP, 252 629, 427100, 428432, 428469, 428492, 428539, C23C 1300, C04B 3500

Patent

active

042051177

ABSTRACT:
Piezoelectric crystalline film on a substrate, which is a crystalline zinc oxide film with a c-axis substantially perpendicular to the substrate surface, the crystalline zinc oxide film containing, as an additive element, phosphorus. The piezoelectric crystalline films have high resistivity and a smooth surface, and make it possible to produce piezoelectric transducers with good conversion efficiency. Such films are made by sputtering zinc oxide and phosphorus onto a substrate from a film material source consisting essentially of a ceramic of zinc oxide containing phosphorus.

REFERENCES:
patent: 3420763 (1969-01-01), Polito et al.
patent: 3573960 (1971-04-01), Duncan
patent: 3766041 (1973-10-01), Wasa et al.
patent: 3988232 (1976-10-01), Wasa et al.

Affiliated with

Also associated with

Rating

Piezoelectric crystalline film of zinc oxide and method for maki does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric crystalline film of zinc oxide and method for maki, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric crystalline film of zinc oxide and method for maki will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1120113