Piezoelectric contamination detector

Details Piezoelectric contamination detector Piezoelectric contamination detector

1984-06-28

1985-12-31

Kreitman, Stephen A.

Measuring and testing

Gas analysis

Gas chromatography

310341, G01N 2712

Patent

active

045612862

ABSTRACT:
A piezoelectric detector for determination of the mass or film thickness of gaseous, liquid or solid substances being adsorbed or condensed on the surface of a piezoelectric resonator, having at least one measuring resonator with at least one integrated thin-film sensor, one discrete or integrated on the resonator re-evaporation heating element, and a reference resonator separated from the measuring resonator with a contamination shield, and protected from contamination, but not from heat radiation, with an optical window, which all allow correction by electronic or numerical means of influences of temperature changes on the resonant frequency and of cut-angle deviations and the temperature differences between the resonators.

REFERENCES:
patent: 3478573 (1969-11-01), King, Jr.
patent: 3818254 (1974-06-01), Persson
patent: 3828607 (1974-08-01), Janzen et al.
patent: 3856466 (1974-12-01), Crawford
patent: 3886785 (1975-06-01), Stadler et al.
Donald A. Wallace, "Miniature Quartz Crystal Microbalance for Contamination Measurement", Journal of Spacecraft and Rockets, vol. 17, No. 2, Mar.-Apr. (1980), pp. 153-156.

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