Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-08-15
2006-08-15
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S331000, C310S324000
Reexamination Certificate
active
07091650
ABSTRACT:
A piezoelectric thick film element array includes at least one piezoelectric element structure having a thickness between 10 μm to 100 μm formed by a deposition process. The at least one piezoelectric element is patterned during the deposition process, and includes a first electrode deposited on a first surface of the piezoelectric elements structure, and a second electrode deposited on a second surface of the piezoelectric element structure. In a further embodiment, several devices are provided using a piezoelectric element or an array having a piezoelectric element structure with a thickness of between 10 μm to 100 μm formed by a deposition process. These devices include microfluidic ejectors, transducer arrays and catheters.
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Buhler Steven A.
Elrod Scott A.
Fitch John S.
Littau Karl A.
Solberg Scott E.
Budd Mark
Fay Sharpe Fagan Minnich & McKee LLP
Palo Alto Research Center Incorporated
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