Piezoelectric ceramic production method and piezoelectric...

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole

Reexamination Certificate

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C029S025350, C310S311000, C310S364000, C252S06290R, C501S137000

Reexamination Certificate

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07056443

ABSTRACT:
A multilayer piezoelectric element2comprising an element body10wherein piezoelectric layers8and internal electrode layers4and6are alternately stacked. The piezoelectric layer8is composed of a piezoelectric ceramic. The piezoelectric ceramic includes a compound oxide having a perovskite structure. The compound oxide contains at least lead, zirconium and titanium. The method of producing the piezoelectric element includes the steps of producing a piezoelectric layer ceramic green sheet, forming a pre-fired element body by alternately stacking the produced piezoelectric ceramic green sheets and internal electrode layer precursor layers, and forming said element body10by performing main firing on the pre-fired element body at a temperature of 1100° C. or lower.

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