Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Reexamination Certificate
2006-06-06
2006-06-06
Norton, Nadine G. (Department: 1765)
Etching a substrate: processes
Forming or treating electrical conductor article
Forming or treating of groove or through hole
C029S025350, C310S311000, C310S364000, C252S06290R, C501S137000
Reexamination Certificate
active
07056443
ABSTRACT:
A multilayer piezoelectric element2comprising an element body10wherein piezoelectric layers8and internal electrode layers4and6are alternately stacked. The piezoelectric layer8is composed of a piezoelectric ceramic. The piezoelectric ceramic includes a compound oxide having a perovskite structure. The compound oxide contains at least lead, zirconium and titanium. The method of producing the piezoelectric element includes the steps of producing a piezoelectric layer ceramic green sheet, forming a pre-fired element body by alternately stacking the produced piezoelectric ceramic green sheets and internal electrode layer precursor layers, and forming said element body10by performing main firing on the pre-fired element body at a temperature of 1100° C. or lower.
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Abe Masaru
Sasaki Satoshi
Chen Eric B.
Norton Nadine G.
TDK Corporation
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