Piezoelectric cantilever pressure sensor array

Details Piezoelectric cantilever pressure sensor array Piezoelectric cantilever pressure sensor array

2006-04-25

2006-04-25

Noori, Max (Department: 2855)

Measuring and testing

Fluid pressure gauge

Vibration type

C073S702000, C073S717000

Reexamination Certificate

active

07032454

ABSTRACT:
A piezoelectric cantilever pressure sensor array is disclosed. The piezoelectric cantilever pressure sensor array contains a substrate, a readout circuit, and piezoelectric cantilever pressure sensors electrically connected to the readout circuit. Each piezoelectric cantilever pressure sensor contains an elongate piezoelectric cantilever mounted at one end on the substrate and extending over a cavity. The piezoelectric cantilever contains a piezoelectric layer sandwiched between two electrodes and generates a measurable voltage when deformed under pressure. The piezoelectric cantilever pressure sensor array can be manufactured at low cost and used in various applications including fingerprint identification devices.

REFERENCES:
patent: 4594898 (1986-06-01), Kirman et al.
patent: 4764244 (1988-08-01), Chitty et al.
patent: 5279162 (1994-01-01), Takebe et al.
patent: 5293095 (1994-03-01), Tamura et al.
patent: 5421213 (1995-06-01), Okada
patent: 6453748 (2002-09-01), Pryor
Parrin, F. et. Al., “A CMOS Comptible Micromachined Tactile Fingerprint Sensor”, Proceeding of the SPIE, vol. 4755, May 6, 2002, pp. 568-575.
Charlot, B. et al., “A Sweeping Mode Integrated Tactile Fingerprint Sensor”, Transducer '03, Jun. 8-12, 2003, vol. 2, pp. 1031-1034.
Atkinson G. M. et al., “Piezoelectric Polyimide Tactile Sensors” Proceeding of the 15th Biennial University/Government/Industry Microelectronics, Jun. 30, 2003, pp. 308-311.
Liqun, Du et al., “Optimal Configuration of Micro Touch Sensor Array Structure”, 2002 Int'l Symposium of Micromechatronics and Human Science, Oct. 20, 2002, pp. 153-158.
Henderson, N. J. et al., “Low-Cost Planar PTF Senosrs for the Identity Verification of Smartcard Holders”, Proceedings of IEEE Sensors 2002, Jun. 12-14, 2002, vol. 1 of 2, pp. 1614-1619.

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