Piezoelectric cantilever pressure sensor

Details Piezoelectric cantilever pressure sensor Piezoelectric cantilever pressure sensor

2006-09-12

2006-09-12

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Vibration type

C073S702000, C073S706000, C073S715000

Reexamination Certificate

active

07104134

ABSTRACT:
A piezoelectric cantilever pressure sensor has a substrate and a piezoelectric cantilever having a base portion attached to the substrate and a beam portion suspended over a cavity. The piezoelectric cantilever contains a piezoelectric layer sandwiched between two electrodes and generates a measurable voltage when deformed under pressure. The piezoelectric cantilever pressure sensor can be manufactured at low cost and used in various applications including fingerprint identification devices.

REFERENCES:
patent: 4906840 (1990-03-01), Zdeblick et al.
patent: 5293095 (1994-03-01), Tamura et al.
patent: 5421213 (1995-06-01), Okada
patent: 5633552 (1997-05-01), Lee et al.
patent: 5780727 (1998-07-01), Gimzewski et al.
patent: 5966787 (1999-10-01), Nakayama et al.
patent: 6453748 (2002-09-01), Pryor
patent: 2002/0053857 (2002-05-01), Scott et al.
patent: 2002/0166388 (2002-11-01), Ganapathi et al.
patent: 0 483 498 (1992-05-01), None
patent: WO 89/07259 (1989-08-01), None
Charlet, B. et al., “A Sweeping Mode Integrated Tactile Fingerprint Sensor”, Transducers, Solid-State Sensors, Actuators, and Microsystems, 12th Intl. Conference 2003, pp. 1031-1034.

Affiliated with

Also associated with

Rating

Piezoelectric cantilever pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric cantilever pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric cantilever pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3588788