Piezoelectric actuator using passivation film or interlayer insu

Details Piezoelectric actuator using passivation film or interlayer insu Piezoelectric actuator using passivation film or interlayer insu

1997-11-06

2000-11-07

Barlow, John

Incremental printing of symbolic information

Ink jet

Ejector mechanism

310328, 310331, 310365, B41J 2045

Patent

active

061426148

ABSTRACT:
Lower electrodes are disposed independently of each other for respective ink cavities through a silicon oxide film on a silicon substrate. PZT films and upper electrodes are disposed on the respective lower electrodes, and then an interlayer insulating film or a passivation film is disposed on top of the whole layer.

REFERENCES:
patent: 4349762 (1982-09-01), Kitamura et al.
patent: 4456850 (1984-06-01), Inoue et al.
patent: 5495137 (1996-02-01), Park et al.
patent: 5719607 (1998-02-01), Hasegawa et al.
patent: 5761783 (1998-06-01), Osawa et al.

Affiliated with

Also associated with

Rating

Piezoelectric actuator using passivation film or interlayer insu does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric actuator using passivation film or interlayer insu, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric actuator using passivation film or interlayer insu will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1634454