Piezoelectric actuator, method for manufacturing the same,...

Details Piezoelectric actuator, method for manufacturing the same,... Piezoelectric actuator, method for manufacturing the same,...

2006-06-20

2006-06-20

Shah, Manish (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S070000, C310S324000, C310S358000

Reexamination Certificate

active

07063407

ABSTRACT:
A piezoelectric actuator includes a vibration plate26, a common electrode27formed on the vibration plate26, a piezoelectric element29formed on the common electrode27, a crystal control layer28formed on the piezoelectric element29, a separate electrode33formed on the crystal control layer28, and an electrode line34formed on the piezoelectric element29. The crystal control layer28is formed in the displacement region. The crystalline structure of a piezoelectric element29ain the displacement region is a perovskite structure, and that of a piezoelectric element29bin the wiring region is a pyrochlore structure.

REFERENCES:
patent: 5754205 (1998-05-01), Miyata et al.
patent: 6051914 (2000-04-01), Nishiwaki
patent: 6639340 (2003-10-01), Qiu et al.
patent: 09156099 (1997-06-01), None

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