Piezoelectric actuator having strain gage

Details Piezoelectric actuator having strain gage Piezoelectric actuator having strain gage

1993-12-22

1994-11-15

Stephan, Steven L.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 4108

Patent

active

053651405

ABSTRACT:
Strain gages (81, 82, 83) are adhered to protective layers (31, 32) and an active portion (2) of a laminated-structure (10) of the piezoelectric actuator, respectively. Since it is possible to measure a total amount of displacement of the protective layers (31, 32) and the active portion (2), the measured amount of displacement of the laminated structure (10) is accurate even if there are difference in strain due to temperature and stress between them. The same effect can be obtained for such actuator whose laminated structure (10) further includes any member such as temperature compensating member (19) of metal whose elastic modulus is different from that of the laminated structure.

REFERENCES:
patent: 4226507 (1980-10-01), Fuschetto
patent: 4520679 (1985-06-01), Hatamura
patent: 4633120 (1986-12-01), Sato et al.
patent: 4742261 (1988-05-01), Rich et al.
patent: 4849668 (1989-07-01), Crawley et al.
patent: 5059850 (1991-10-01), Yashimura et al.
patent: 5111101 (1992-05-01), Imoto
patent: 5126618 (1992-06-01), Takahashi et al.
patent: 5239366 (1993-08-01), Kittell et al.
K. Murakawa et al., "Piezoelectric Actuators", The Sumitomo Search (Japan), No. 47, Oct. 1991, pp. 141-144.
Patent Abstracts of Japan, vol. 12, No. 291 (E-644), Aug. 9, 1988 (JPA-63-066980).

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