Piezoelectric-actuator driving device and exposure apparatus...

Details Piezoelectric-actuator driving device and exposure apparatus... Piezoelectric-actuator driving device and exposure apparatus...

2008-09-30

2010-12-14

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S316030, C029S025350, C359S443000

Reexamination Certificate

active

07851969

ABSTRACT:
A driving device includes a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers, a failure detecting unit configured to detect failure of the laminated units, a plurality of switches provided corresponding to the laminated units and configured to enable and disable current supply to the laminated units, and a driving circuit configured to supply a current for driving to a normal laminated unit of the laminated units, on the basis of an output from the failure detecting unit.

REFERENCES:
patent: 5786654 (1998-07-01), Yoshida et al.
patent: 6147434 (2000-11-01), Nakano et al.
patent: 6193032 (2001-02-01), Lesieutre et al.
patent: 2002-185056 (2002-06-01), None
patent: 2002-257000 (2002-09-01), None

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