Piezoelectric actuator and a lithographic apparatus and a...

Details Piezoelectric actuator and a lithographic apparatus and a... Piezoelectric actuator and a lithographic apparatus and a...

2006-04-25

2006-04-25

McPherson, John A. (Department: 1756)

Dynamic magnetic information storage or retrieval

Head mounting

For adjusting head position

C250S492220, C250S492100, C073S514340, C385S018000, C430S311000

Reexamination Certificate

active

07035056

ABSTRACT:
A lithographic projection apparatus comprising at least one of a radiation system and a projection system having at least one of a reflective and a refractive optical member, wherein the optical member is supported by at least one piezoelectric actuator for positioning the optical member. The piezoelectric actuator comprises three parallel plates stacked on top of one another with piezoelectric stacks between the plates.

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patent: 0 360 975 (1990-04-01), None
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patent: 5-154743 (1993-06-01), None
patent: 2001-297982 (2001-10-01), None
patent: 2001-0095137 (2001-11-01), None
patent: WO 93/19494 (1993-09-01), None

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