Piezoelectric actuated mirror array

Details Piezoelectric actuated mirror array Piezoelectric actuated mirror array

1994-05-20

1998-03-31

Nelms, David C.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359254, 359850, G02B 2600

Patent

active

057344922

ABSTRACT:
An array of M.times.N piezoelectric actuated mirrors is prepared by: obtaining a piezoelectric ceramic wafer; forming an array of M.times.N signal electrodes on the bottom surface of said ceramic wafer and M+1 common reference electrodes on the top surface thereof; mounting said ceramic wafer treated in accordance with above described step on an active substrate matrix; covering said M+1 common reference electrodes with M+1 photoresistive necked segments; providing a set of M trenches, wherein each of the M trenches is located between two common reference electrodes and on the centerline of the signal electrodes, runs parallel to the common reference electrodes, is provided with a set of N-1 identically sized grooves, running perpendicular thereto; placing an array of M.times.N hinges on said top surface of said ceramic wafer treated in accordance with the above described steps; forming a mirror on the top surface of each of said M.times.N hinges; removing said M+1 photoresistive necked segments; and connecting electrically each of said M+1 common reference electrodes to a common ground potential.

REFERENCES:
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 4615595 (1986-10-01), Hornbeck

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