Piezoactuator and drive circuit therefor

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Details

C310S316020, C310S323020, C318S116000

Reexamination Certificate

active

06841919

ABSTRACT:
A piezoactuator has a diaphragm, and the diaphragm has flat piezoelectric elements that oscillate in a longitudinal oscillation mode and a sinusoidal oscillation mode. A first electrode for detecting oscillation in the longitudinal oscillation mode, and a second electrode for detecting the amplitude of oscillation in the sinusoidal oscillation mode, are disposed on the surface of the diaphragm. When the piezoactuator is driven with a drive signal, the phase difference of a first detection signal output from the first electrode and a second detection signal output from the second electrode is detected. The frequency at which the detected phase difference becomes the maximum phase difference is then obtained, and a drive signal of a matching frequency is applied to the piezoelectric elements.

REFERENCES:
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patent: 6054795 (2000-04-01), Yamamoto et al.
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patent: 6661154 (2003-12-01), Shibatani
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patent: 2000-295876 (2000-10-01), None
patent: 2001-286164 (2001-10-01), None

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