Piezo resistive pressure sensor

Details Piezo resistive pressure sensor Piezo resistive pressure sensor

2007-07-30

2009-08-11

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C361S283400

Reexamination Certificate

active

07571650

ABSTRACT:
Various embodiments and methods relating to a pressure sensor having a flexure supported piezo resistive sensing element are disclosed.

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