Piezo resistance type semiconductor device and its...

Details Piezo resistance type semiconductor device and its... Piezo resistance type semiconductor device and its...

2007-01-09

2007-01-09

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S727000, C073S754000

Reexamination Certificate

active

11149146

ABSTRACT:
In a piezo resistance type semiconductor device, a detecting sensitivity and output linearity are improved without increasing a forming region of a diaphragm. In a piezo resistance type semiconductor device having: a diaphragm; a supporting frame which is connected to an external periphery of the diaphragm, supports the diaphragm, and is formed relatively thicker than the diaphragm; and piezo resistance type stress detectors (4a, 4b) each for detecting a stress caused when the detector is distorted by deformation of the diaphragm by application of an acceleration or a pressure in the direction perpendicular to the diaphragm, at least a part of the diaphragm is cut off in a position where it is come into contact with the piezo resistance type stress detector and a groove is formed.

REFERENCES:
patent: 2002/0134177 (2002-09-01), Takeuchi et al.
patent: 8-247874 (1996-09-01), None
patent: 2002-71492 (2002-03-01), None

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