Piezo-on-diamond resonators and resonator systems

Details Piezo-on-diamond resonators and resonator systems Piezo-on-diamond resonators and resonator systems

2007-06-01

2010-10-12

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C310S321000

Reexamination Certificate

active

07812692

ABSTRACT:
Disclosed are piezoelectrically-transduced micromachined bulk acoustic resonators fabricated on a polycrystalline diamond film deposited on a carrier substrate. Exemplary resonators comprise a substrate having a smooth diamond layer disposed thereon. A piezoelectric layer is disposed on the diamond layer and top and bottom electrodes sandwich the piezoelectric layer. The resonant structure comprising the diamond layer, piezoelectric layer and electrodes are released from the substrate and are free to vibrate. Additionally, one or more sensing platforms may be coupled to the substrate to form a mass sensor.

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