Picture processing method in optical measuring apparatus

Details Picture processing method in optical measuring apparatus Picture processing method in optical measuring apparatus

1992-08-28

1994-05-10

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

356376, 382 8, G01B 1124

Patent

active

053112890

ABSTRACT:
An optical measuring apparatus for use in this method has a projector for radiating a slit light on a workpiece and an image sensing device for picturing an optically cross-sectional image drawn by the slit light radiated on the workpiece. An optical axis of the slit light and an optical axis of the image sensing device cross each other at an oblique angle. Setting windows are set at predetermined positions of the optically cross-sectional image on a screen of the image sensing device. A position of center of gravity of each optically cross-sectional image in each of the windows is measured. An amount of displacement in an X-axis direction of the optically cross-sectional image on the screen is measured. A rate of magnification of the optically cross-sectional image in a Y-axis direction is calculated from the amount of displacement. Setting positions of the windows in the Y-axis direction and sizes thereof in the Y-axis direction are changed depending on the rate of magnification.

REFERENCES:
patent: 4801207 (1989-01-01), Williams
patent: 4961155 (1990-10-01), Ozeki et al.
patent: 5129010 (1992-07-01), Higuch et al.
Japanese Patent Publication No. 62-56814, Mar. 12, 1973, with English Abstract.

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