Pickup chuck for multichip modules

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Patent

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Details

324765, 3241581, 279126, G01R 3126, G05D 2300

Patent

active

060694831

ABSTRACT:
A pickup chuck which includes a body defining a fluid flow path and a first recess for receiving a semiconductor chip package, at least two chip contact members extending out of the body into the recess, each of which being independently movable in a first direction which is out of the body and in a second direction which is into the body, springs biasing the members into the first direction, flanges limiting movement of each member into the first direction, and one or more heat dissipation fins located within the fluid flow path and engaged with the members to conduct heat therefrom.

REFERENCES:
patent: 4502094 (1985-02-01), Lewin et al.
patent: 5124639 (1992-06-01), Carlin et al.
patent: 5775416 (1998-07-01), Heimanson et al.
patent: 5847366 (1998-12-01), Grunfeld
patent: 5950723 (1999-09-01), Heimanson et al.

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